| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C307-02 |
| filingDate |
2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40300e80f018e42f29f71f41c25b11e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a549d2b56fbabdf2cc6d01a236e3b138 |
| publicationDate |
2003-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003215791-A |
| titleOfInvention |
Super strong acid onium salt compound and radiation-sensitive resin composition |
| abstract |
PROBLEM TO BE SOLVED: To provide a novel super-strong onium salt compound which is suitable for a radiation-sensitive acid generator of a radiation-sensitive resin composition used as a chemically amplified resist and which can generate an acid with high sensitivity and efficiency. And an excellent chemically amplified positive-type radiation-sensitive resin composition using the super strong acid onium salt compound. A super strong onium salt compound represented by the following general formula (1), (2) or (3), and an excellent chemically amplified positive radiation sensitive material using the super strong onium salt compound Resin composition. Embedded image |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004085657-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006301304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150037566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4525440-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4093805-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011201810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3854835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015092231-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011132702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102293088-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007511785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012041482-A |
| priorityDate |
2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |