http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003215785-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64 |
| filingDate | 2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54c05bf6200bd75857a8bfa007255fce |
| publicationDate | 2003-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003215785-A |
| titleOfInvention | Pattern protection apparatus, mask apparatus and manufacturing method thereof, exposure apparatus and exposure method, and device manufacturing method |
| abstract | (57) [Summary] [PROBLEMS] To maintain exposure light transmittance favorably and stably. SOLUTION: A pattern protection material 75 is mounted on one surface, and the other surface is a mounting surface for a reticle substrate 54, and at least one opening 22A is formed on the frame 76; A pattern protection device including a lid member 26A capable of opening and closing the opening is attached to the reticle substrate. Therefore, dust is prevented from adhering to the pattern surface of the reticle substrate, and even after the pattern protection device is attached to the reticle substrate, the opening formed in the frame is opened, so that any At this point, the gas in the space surrounded by the pattern protection device and the reticle substrate can be replaced with a predetermined gas. That is, by opening the opening prior to exposure and replacing the gas in the space with a low-absorbing gas, the exposure light transmittance can be maintained satisfactorily and stably. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005316492-A |
| priorityDate | 2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.