| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd83260a96356882b5f50dd097411a72 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2815 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-06 |
| filingDate |
2002-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_594a27fccd833429ccc547190cfe7be2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91c943265b3e94f675ae6438316886cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5ec20bb5fc6cf4ac444a30f074a34d0 |
| publicationDate |
2003-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003214831-A |
| titleOfInvention |
Film thickness measuring method and film thickness measuring device |
| abstract |
[PROBLEMS] To accurately measure the thickness of a thin film formed on a substrate. A film thickness measuring device irradiates an electron beam to a thin film to be measured formed on a substrate, and measures a substrate current value flowing through the substrate at that time. The film thickness measuring device 18 corrects the substrate current value in consideration of the influence of the charge distribution generated near the thin film 34 by the irradiation of the electron beam or the substrate surface shape near the thin film 34. The film thickness measuring device 18 acquires reference data indicating the relationship between the film thickness and the substrate current in the standard sample, and calculates the film thickness of the thin film to be measured from the corrected substrate current value in consideration of the reference data. . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006073063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4987486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013040875-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013040874-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008034475-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006073063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105470162-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105470162-A |
| priorityDate |
2002-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |