| abstract |
PROBLEM TO BE SOLVED: To provide a glass having properties suitable for producing a poly-Si coating on a surface. An electronic device using such a glass is also provided. SOLUTION: Strain point exceeding 780 ° C, 0-300 ° C Coefficient of thermal expansion of 20-60 × 10 −7 / ° C., 8.28 Young's modulus greater than × 10 4 MPa (12 Mpsi), And a titania-lanthanum oxide aluminosilicate glass having a weight loss of less than 1 mg / cm 2 in buffered hydrofluoric acid. Titania can be partially or completely replaced by tantalum oxide. This glass, expressed in mole percent, 40-90% of SiO 2, 5-35% of Al 2 O 3, 2- 30% La 2 O 3, and 0.5-20% (TiO 2 + Ta 2 O 5 ). |