| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12 |
| filingDate |
2002-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6f8745ea93bc921b8bd96f05ba36e5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18e52138b4a6552a668ea877a1f7eb27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab8a82652221d336d2cbfb3e8c1b4543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e9500b02637d0c5f7c9ba6bf7ee4054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa76df742afebeea1d0e5df1dac759f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f0f44e50941b192a3990220a41fc463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_821245c5ad732ac45e7bf708d0ffb4e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1acace02b105c6d84bac74f7e82c50cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfe61e8e8be2993858c0f6cddd5d6323 |
| publicationDate |
2003-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003205427-A |
| titleOfInvention |
Electrolytic processing method and apparatus |
| abstract |
(57) [PROBLEMS] To provide an electrolytic processing method and apparatus for removing a ruthenium film by electrochemical action in ultrapure water or a dilute liquid. SOLUTION: A ruthenium film serving as an anode and a processing electrode 22 serving as a cathode are disposed at a predetermined interval, and an ion exchanger 24 is disposed between the ruthenium film and the processing electrode 22; A voltage is applied between the ruthenium film and the processing electrode 22 while supplying the liquid 14 between the ruthenium film and the processing electrode 22 to cause relative movement between the ruthenium film and the processing electrode 22. |
| priorityDate |
2002-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |