http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003203876-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dec4d1ff9bbf4d655bc09a747cbae06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_484aa8851b89f61c62677d2f7eeda646 |
| publicationDate | 2003-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003203876-A |
| titleOfInvention | Laser irradiation device |
| abstract | (57) [Problem] To provide an end portion of a linear, rectangular, or planar laser beam formed on or near an irradiation surface by an optical system, the energy density gradually increases due to lens aberrations and the like. It has decayed. In such a region (attenuation region), the energy density is not sufficient as compared with the region having a high uniformity of the energy density, and the energy is gradually attenuated. Can not. The present invention divides respective laser lights emitted from a plurality of lasers, and combines laser lights emitted from different lasers and including at least one laser light having a different energy distribution. Or a laser beam including at least one laser beam having a different energy distribution is selected and combined via a convex lens installed obliquely to the traveling direction of each laser beam, thereby achieving uniformity of the energy distribution. To form an excellent laser beam. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8525075-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9296068-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005311346-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7229535-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020044579-A |
| priorityDate | 2001-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.