| abstract |
(57) [PROBLEMS] To provide a means for efficiently and economically removing an organic film, for example, a resist film on a substrate in a short time using a processing solution which is safe even at a high temperature and can be recycled. To do. A method for removing an organic film on the surface of a substrate by bringing a substrate having an organic film into contact with a treatment liquid composed of liquid ethylene carbonate, propylene carbonate or a liquid mixture of both heated to 50 to 200 ° C. |