| abstract |
[57] [Problem] To obtain a composite structure made of a brittle material, having a high visible light transmittance, and having a high-hardness transparent structure integrated with a substrate. After filling fine particles of aluminum oxide with a submicron particle size and a purity of 99.8% into an aerosol generator 13, the gas cylinder 11 is opened, and the aerosol generator is passed through a transport pipe 12 at a flow rate of 3 liters / minute. 13 to generate an aerosol in which aluminum oxide fine particles are dispersed in a gas. This aerosol is transferred to the transport pipe 12 Then, the aluminum oxide fine particles are jetted toward the substrate 16 from the nozzle 15 while being accelerated at a high speed. |