http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003179282-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
| filingDate | 2002-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16e15119c0189ca3904983759c5ff991 |
| publicationDate | 2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003179282-A |
| titleOfInvention | Thin film piezoelectric element, method of manufacturing the same, and actuator device using the same |
| abstract | (57) Abstract: A thin-film piezoelectric element formed on a substrate by a thin-film process is held only by an element holding film and a frame structure provided around the thin-film piezoelectric element, thereby improving mass productivity including a mounting process. SOLUTION: A step of forming a plurality of thin film piezoelectric elements 8 on one surface of an element forming substrate 7 and holding an element made of resin on one surface of the element forming substrate 7 including the thin film piezoelectric elements 8 A step of covering the film 20 and removing the element forming substrate 7 in a region where the thin film piezoelectric element 8 is formed, thereby holding the thin film piezoelectric element 8 with the element holding film 20; And separating the thin film piezoelectric elements 8 individually or by predetermined units. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016162820-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017050355-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016039343-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189776-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828524-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011066321-A |
| priorityDate | 2001-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.