http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003179046-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
filingDate | 2002-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cdc5676007ef9b809bd4bbc90547924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bee50e65447e045d4dacda0c23cbbbf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1c294a98f93161b5852e8b601c0f25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e9c07f550c570b8daf40567a264d035 |
publicationDate | 2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2003179046-A |
titleOfInvention | Laminated films, insulating films and semiconductor substrates |
abstract | (57) [Summary] (Correction) [PROBLEMS] To obtain a laminated film for a semiconductor having excellent adhesion to a CVD film in a semiconductor element or the like. At least one selected from the group consisting of (A) an organic compound film having a carbon content of 60% by weight or more, and (B) a compound represented by the following general formulas (1) to (4). A laminated film comprising a film obtained by heating a hydrolysis-condensation product obtained by hydrolyzing and condensing the compound of (1). (1) HSi (OR 51 ) 3 , (in the formula, R 51-57 Represents a monovalent organic group. ). (2) R a 'Si ( O R 52 ) 4-a ′ , (wherein R represents a fluorine atom or a monovalent organic group, and a ′ represents an integer of 1 to 2). (3) Si (OR 53 ) 4 (4) R 54 b (R 55 O) 3-b ' Si- (R 58 ) d' —Si (OR 56 ) 3-c ′ R 57 c ′ [wherein b ′ and c ′ are the same or different and are an integer of 0 to 2, R 58 is an oxygen atom, a phenylene group or — (CH 2 ) n '- a group represented by (wherein, n' is an integer from 1 to 6), n 'represents 0 or 1. ]. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005183816-A |
priorityDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1773.