| abstract |
(57) Abstract: An object of the present invention is to provide an organic EL manufacturing apparatus which does not contaminate the surroundings with an organic material and prevents external dust and impurities from being mixed. SOLUTION: In an apparatus for manufacturing an organic electroluminescent device in which an organic layer including a light emitting layer and a metal electrode are sequentially formed on a substrate provided with a transparent electrode, an organic layer formed on the transparent electrode, and the organic layer Each processing chamber is connected in an airtight manner so that a metal layer formed thereon is not exposed to the atmosphere, and at least a processing chamber (organic layer forming chamber) 2 for forming an organic layer is a double glove box 21. , 22 and an apparatus for applying an organic layer to the inner glove box 22 is provided. |