| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bbc2efd6a7b278e283fa2c2753790fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b70c28d8bf2013be0ccb84c86e11843 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2200-0667 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-12 |
| filingDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcc61cc44e1d710195927cf7df01b3a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa49bccce72f729e1d4cccf4acaffde9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d17b5bd3c9b953022851eff66ff50b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e7f33c57dda75e691a29baf35a1e192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80704ea1c117a2e44d5ccda16fef9f4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5995a4614342c034d785d74139bfc0db |
| publicationDate |
2003-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003165969-A |
| titleOfInvention |
Composition for sealing material and sealing material using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a fluorine-containing elastomer-based sealing material suitable for use in a semiconductor device manufacturing apparatus, which does not contain metal or sulfur, and which can be used with a small compression set at the same hardness. A novel sealant that can form a sealant that is hardly permanently deformed by compression at the time and has a long service life without causing physical property variations within one sealant or between two or more sealants. And a sealing material using the same. SOLUTION: The composition for a sealing material comprises a crosslinkable fluoroelastomer and a crosslinker for causing a crosslink reaction thereof, and a polyimide resin powder as a reinforcing agent. For the sealing material, the composition for a sealing material was molded into a predetermined shape and subjected to a crosslinking reaction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021513592-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010074038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007119834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7321168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011513554-A |
| priorityDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |