| abstract |
PROBLEM TO BE SOLVED: To provide not only low dielectric constant, heat-resistant dimensional stability, flatness and solvent resistance, but also excellent transparency, heat discoloration resistance and resolution, and to provide a good pattern shape. Provided is a radiation-sensitive resin composition. A radiation-sensitive resin composition comprising (A) an alicyclic olefin resin, (B) an acid generator, (C) a crosslinking agent, and (D) a solvent, wherein (B) an acid generator Is an ester compound of a phenol having a saturated alicyclic structure in the molecule and a quinonediazidesulfonic acid halide. |