http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003161742-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db0ca12b4b1f98e17edddb9bdcf105b8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a59c9c156c125c294981423f522d3cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8d548346ed3761e7674cade96678cf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0519742fc45a51cb15821b5e57871e1e |
| publicationDate | 2003-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003161742-A |
| titleOfInvention | Silicon probe card and method for manufacturing the same |
| abstract | (57) [Summary] [PROBLEMS] The position of each inspection terminal made of needle-like crystals arranged at an extremely small pitch can be reliably determined by photographing with a camera, and the position of the electrode pad and each inspection terminal is determined. Provided are a silicon probe card capable of performing alignment automatically and a method of manufacturing the same. A surface of a Si substrate is covered with an insulating surface, and a conductive film forming surface having the same pattern as a wiring pattern and an alignment mark are formed on the insulating surface. The needle-like crystal 4 is formed, and the conductive film forming surface 3, the needle-like crystal 4, and the alignment mark 20 are selectively plated on the insulating surface 2. While forming the film, the alignment mark 20 Is coated with a metal coating 21 having a reflectance different from that of the insulating surface. |
| priorityDate | 2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.