http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003158052-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2002-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc00995fea568242a1d4342b5925662d |
| publicationDate | 2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003158052-A |
| titleOfInvention | Ceramic substrate for semiconductor manufacturing and inspection equipment |
| abstract | (57) [Summary] [PROBLEMS] To provide a connection reliability that is excellent in temperature rising / falling characteristics and adsorption ability, and does not cause a problem of damage to a heating element or damage to an external terminal even when a force is applied to the external terminal. To provide a ceramic substrate used for high-level semiconductor manufacturing and inspection equipment. SOLUTION: In a ceramic substrate having a conductor buried therein, a columnar conductive connection pad is provided from the buried conductor as a starting point toward the substrate surface, and a blind hole is formed in the connection pad. And a ceramic substrate having external terminal connection pins attached to the blind holes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7016347-B2 |
| priorityDate | 1999-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.