| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate |
2002-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc00995fea568242a1d4342b5925662d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate |
2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003158051-A |
| titleOfInvention |
Ceramic substrate for semiconductor manufacturing and inspection equipment |
| abstract |
(57) [Problem] To provide a ceramic substrate having excellent temperature control characteristics such as temperature rising / falling characteristics or adsorption characteristics and high reliability of connection to external terminals. SOLUTION: A plate-shaped conductor made of conductive ceramic is embedded in a ceramic substrate, and a connection pad for connecting an external terminal is provided in contact with one surface of the conductor, and the connection pad has a high melting point. Ceramic substrate made of metal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008251361-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011023716-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012114472-A |
| priorityDate |
1999-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |