| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74 |
| filingDate |
2002-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc00995fea568242a1d4342b5925662d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate |
2003-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003151869-A |
| titleOfInvention |
Ceramic substrate for semiconductor manufacturing and inspection equipment |
| abstract |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing / manufacturing method which is thin and light, can make the temperature distribution of a wafer heating surface uniform, and can immediately reflect the temperature of a heating element to the temperature of a substrate working surface. To provide a ceramic substrate for an inspection device. A ceramic substrate in which a flat plate-shaped heating element having a cross-sectional aspect ratio (width of a heating element / thickness of a heating element) of 10 to 10,000 is embedded inside a ceramic substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013084938-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I424519-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9042078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103907181-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013047648-A1 |
| priorityDate |
1999-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |