http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003130889-A

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filingDate 2001-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af35c36524b5dcf854a270f3ef857a9c
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publicationDate 2003-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003130889-A
titleOfInvention Semiconductor device inspection apparatus and inspection method
abstract (57) [Summary] Conventionally, when inspecting the characteristics of an electronic component, a high voltage is applied from the inspection electrode to the electronic component in the air. Discharge occurred between the lands. However, as a method of preventing discharge, there is only a method of covering a part of the test electrode with an insulating film, and the discharge during the test cannot be sufficiently prevented. As a result, problems such as reinspection and breakage of electronic components have occurred. In view of the above problems, in order to prevent discharge during inspection of characteristics of an electronic component, application of a high voltage from an inspection electrode to the electronic component is performed in an insulating liquid. Use an electronic component inspection device that can.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10725086-B2
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Total number of triples: 38.