| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-28 |
| filingDate |
2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23cfb055bf88286becaa503a8173bab7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_724302c60018d8e2968e4e81acf02b93 |
| publicationDate |
2003-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003119344-A |
| titleOfInvention |
Hybrid compound, resist material and pattern forming method |
| abstract |
(57) [Summary] A phenol resin and the following general formula (1): R 1 n Si (OR 2 ) 4-n (1) (wherein R 1 is a monovalent compound containing a sulfur atom or an oxygen atom) R 2 represents a monovalent hydrocarbon group, and n represents 1 Or 2. A) a hybrid compound comprising a silicone resin obtained by hydrolyzing and condensing the organooxysilane represented by the formula (1). According to the present invention, it is possible to provide a hybrid compound which is used as a base polymer of a resist material and gives excellent adhesion to a metal substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101142999-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015055821-A |
| priorityDate |
2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |