| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-722 |
| filingDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b83941a7fe7cb7b0b664d40986e7e5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109a9da6ad11e1437dd2e5df2e8ad539 |
| publicationDate |
2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003109930-A |
| titleOfInvention |
Cleaning solution and cleaning method for semiconductor device substrate |
| abstract |
(57) [PROBLEMS] To remove fine particles and organic contamination adhered to the surface of a substrate for a semiconductor device or a display device substrate without corroding silicon by cleaning, and to highly clean the substrate surface. Provided are a cleaning solution and a cleaning method for a substrate surface. A cleaning solution for a substrate for a semiconductor device, characterized by containing at least the following (A) to (C). (A) an alkaline component (B) a nonionic surfactant having a repeating unit of an oxyalkylene group having 4 or more carbon atoms (C) water |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017152748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7896970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140129016-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013229569-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015189899-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101997950-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102533273-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005051099-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005051101-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010226089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006016438-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10113141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9845444-B2 |
| priorityDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |