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filingDate 2001-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aa5813db9f94043591e7270813fcaa3
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publicationDate 2003-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003084042-A
titleOfInvention Semiconductor device and its inspection device
abstract (57) Abstract: A semiconductor device that can be effectively inspected by an inspection device even if the semiconductor device has a reduced chip size and a reduced pad pitch. A plurality of pads (2) are provided at both ends of a semiconductor substrate (1). a and 2b are formed, and the input pad group 2a is And an input / output pad group 2b is arranged on the right end side. The BIST circuit 10 is arranged at the upper right end of the semiconductor device 1 and A pad near the ST circuit 10 is the BIST-dedicated pad 3a. As the number of input pads increases, the area for arranging BIST pads is limited, and all BIST pads are used in the semiconductor device 1. The BIST pad is divided at both ends of the semiconductor device 1, the one near the BIST circuit 10 is a dedicated pad 3 a, the other is a shared pad 3 b, and the pads 3 a and 3 b are connected to the semiconductor device 1. Is divided into upper and lower areas. It is not necessary to form a large number of beams only in the upper region or the lower region of the inspection device, and the problem of strength and the difficulty in production can be solved.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011508936-A
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priorityDate 2001-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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