| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C40B30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate |
2001-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9b998743caa7ddbe8068c5742203604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51fc345dec20d4c73afac5d7ffcf94e6 |
| publicationDate |
2003-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003083855-A |
| titleOfInvention |
Method and apparatus for manufacturing metal oxide thin film library |
| abstract |
(57) Abstract: The present invention provides a method and a manufacturing apparatus capable of manufacturing a plurality of types of metal oxide thin films in a short time. A method of manufacturing a metal oxide thin film library by simultaneously forming a dip coating film on a plurality of substrates using a plurality of types of coating solutions. |
| priorityDate |
2001-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |