http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003073819-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9003d717bb40121f7d68127c582a63d5 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-457 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
filingDate | 2001-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca77c4ce2e957432494ed19711c9667 |
publicationDate | 2003-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2003073819-A |
titleOfInvention | Tin-antimony oxide sintered compact target and method for producing the same |
abstract | PROBLEM TO BE SOLVED: To provide a tin-antimony oxide sintered body target for forming a transparent conductive thin film having a high density and a low specific resistance, and to provide a method for producing this target. SOLUTION: In a sintered body target mainly composed of tin oxide and antimony oxide, zinc oxide is contained in a blending amount of 5 to 20% by weight. A tin oxide powder, an antimony oxide powder, and a zinc oxide powder whose content in the mixed powder is 5 to 20% by weight are mixed, and the obtained mixed powder is formed by a cold press method or a slurry casting method, and then fired. To obtain a sintered body. The specific resistance of this sintered target is 50 mΩ Cm or less, and the relative density is 90% or more. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100340698-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100971866-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013507526-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108516820-A |
priorityDate | 2001-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.