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publicationDate 2003-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003073145-A
titleOfInvention Fine processing method of glass substrate, glass substrate for fine processing and fine processed glass product
abstract PROBLEM TO BE SOLVED: To provide a method for finely processing a glass substrate and a glass substrate for fine processing for efficiently forming an uneven shape having a controlled height and width at an arbitrary position on the surface of the glass substrate. thing. SOLUTION: An area where an etching rate for an etching solution to be used is different from other portions is provided on a surface of a glass substrate and in the vicinity thereof, and then the glass substrate is chemically etched with the etching solution to obtain a glass substrate. A method for finely processing a glass substrate for forming irregularities on the surface of a material, and a region having an etching rate for an etching solution to be used which is different from other portions on a surface of the glass substrate and in the vicinity thereof, and It is a glass substrate for fine processing that has the ability to form irregularities on the surface of the glass substrate by a selective etching process.
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