http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003065989-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d316236a0e2fdbd60b083b47d01d28a7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2001-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e665cc6daa4a16c7bc66e9dce81a4ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_271a19e8bac5769946790fe477d026f4 |
| publicationDate | 2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003065989-A |
| titleOfInvention | Metal oxide semiconductor gas sensor |
| abstract | (57) [Summary] [PROBLEMS] To provide a metal oxide semiconductor gas sensor having extremely high sensitivity as a sensor and hardly affected by aging. An electrode (15) is formed on a substrate (10), and thereafter, a reduced pressure tank (21) incorporating a heat insulating plate (22) for mounting the substrate, and connected to a reduced pressure tank, comprising a powder introduction probe (26) and a high frequency coil (25). The substrate is placed on a heat insulating plate using the induction plasma spraying device 20 including the plasma torch 24, and the distance between the substrate-side tip of the powder introduction probe and the substrate is set to 1,000 mm or less, and the pressure in the pressure reducing tank is reduced. A high frequency induction plasma is generated by a high frequency coil, and a metal oxide powder is supplied from a powder introduction probe to form a large particle portion having a large particle diameter on a substrate surface and a large number of small particle portions formed on a peripheral surface of the large particle portion. A metal oxide semiconductor gas sensor having a metal oxide deposited thereon is obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113447530-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101477-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006006493-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010222677-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1820005-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007322184-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007304086-A |
| priorityDate | 2001-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.