| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-4012 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-4025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0604 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-40 |
| filingDate |
2001-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dec4d1ff9bbf4d655bc09a747cbae06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 |
| publicationDate |
2003-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003059859-A |
| titleOfInvention |
Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device |
| abstract |
(57) [PROBLEMS] To provide a laser irradiation method in which the energy distribution of laser light on the irradiation surface is uniform even in a laser having high coherence, and a laser irradiation apparatus for performing the same. To do. It is another object of the present invention to provide a method for manufacturing a semiconductor device using a semiconductor film obtained by crystallization of a semiconductor film or activation of an impurity element by the laser irradiation method. A structure of an invention relating to a laser irradiation apparatus disclosed in this specification includes a plurality of lasers, a unit for controlling oscillation of the plurality of lasers, and a plurality of laser beams emitted from the plurality of lasers. It has means for combining with laser light, means for condensing the laser light at or near the irradiation surface, and means for moving the laser light in at least one direction. Using such a laser irradiation apparatus, the semiconductor film can be irradiated with laser light to crystallize the semiconductor film or activate the impurity element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004343091-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007096275-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004343093-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007027612-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100825701-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4503344-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4515136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006134986-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7746528-B2 |
| priorityDate |
2001-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |