http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003057822-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92c31834d8f2cf218af417d89647356b |
| publicationDate | 2003-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003057822-A |
| titleOfInvention | Negative resist composition for electron beam or X-ray |
| abstract | [57] [Summary] [PROBLEMS] To provide a PBD having high sensitivity and improved roughness. An electron beam or X-ray negative resist composition excellent in stability and mark detection suitability is provided. (A) a compound capable of generating an acid upon irradiation with an electron beam or X-ray; (b) an alkali-soluble resin; and (c). In a negative resist composition containing a crosslinking agent that crosslinks with an acid, component (a) is a nonionic B in the cation part. An onium salt compound having r, I, Se or Te, or a substituent containing nonionic Br, I, Se or Te, or nonionic Br, I, Se or Te on the benzene ring A negative resist composition for electron beam or X-ray, which is a sulfonic acid ester of N-hydroxyimide. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009251392-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I751249-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008290947-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018117167-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009237172-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11048166-B2 |
| priorityDate | 2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 308.