http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003054934-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D67-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G83-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-30 |
| filingDate | 2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_534bda79dfd013382281e533ee1cba83 |
| publicationDate | 2003-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003054934-A |
| titleOfInvention | Porous silicon oxide thin film and method for producing the same |
| abstract | [PROBLEMS] To provide a silicon oxide thin film having a porous structure of a molecular order without heating by a conventional method. In order to develop applications expected from the morphology, the configuration of a silicon oxide thin film with a controlled porous structure was an issue. [Means for Solving the Problems] After forming a copolymer thin film by plasma polymerization of a mixed gas of a silicon-based monomer and a hydrocarbon-based monomer in a fixed ratio, the copolymer thin film is further used as a plasma source with oxygen or an oxygen-containing gas. A porous silicon oxide thin film obtained by performing treatment by electric discharge, etching away a polymer component derived from a hydrocarbon monomer, and simultaneously oxidizing a silicon polymer portion to convert it to silicon oxide. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006035893-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10843137-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4654195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017098887-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005247678-A |
| priorityDate | 2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.