| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2002-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db88fcf554570a7f3f7f58f966714624 |
| publicationDate |
2003-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003045878-A |
| titleOfInvention |
Semiconductor element wiring forming method |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for forming a wiring of a semiconductor element capable of facilitating (111) crystal growth of a Cu wiring, improving electromigration characteristics of the Cu wiring, and improving reliability of the Cu wiring. I do. SOLUTION: A step of patterning an interlayer insulating film on a substrate to form a trench, a step of forming a barrier metal film on the trench and the interlayer insulating film, and a step of forming a seed Cu film on the barrier metal film , The seed C forming a PVD metal film on the u film by PVD, Depositing an electroplating metal film on the PVD metal film so as to fill the trench, and forming a metal wiring so that the interlayer insulating film is exposed and remains only in the trench. . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7202168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017092444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100364045-C |
| priorityDate |
2001-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |