| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2001-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e4ccddb5ae10b31dd02b26eff34c614
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_366ee697e6bbce4220739cd5684b38e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a953fb6a921625e80641875cde3d848c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4643f99c9c09b61b5c56c57cedd6a0d6 |
| publicationDate |
2003-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003037094-A |
| titleOfInvention |
Substrate processing equipment |
| abstract |
(57) [Problem] To provide a processing apparatus in which contamination of a substrate with droplets is prevented when the substrate is carried in / out. A shutter plate closing a substrate loading / unloading port. 6 is configured to be rotatable by 90 degrees by the shutter drive mechanism 77. Further, the shutter plate 76 includes the partition wall 72 and the rotation support plate 2. 1 is a size that covers the substrate W in a passage through which the substrate W passes. When the substrate W is loaded / unloaded, the above-described shutter plate 76 is rotated and moved above the passage to cover the substrate W, thereby preventing the droplets from dropping onto the substrate W and being contaminated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006513906-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100782599-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108212883-A |
| priorityDate |
2001-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |