http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003034863-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cc6308ab87be94f5dc0c2decc456796f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate | 2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c940e71d6a7a71f4c5fe97c3423a179 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecbd6f2aa3f9f87723ab69e538765ca3 |
| publicationDate | 2003-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003034863-A |
| titleOfInvention | Vacuum deposition equipment |
| abstract | (57) [Problem] To provide a vacuum film forming apparatus capable of forming a dense and high quality film with a strong adhesive force to a base material and without being restricted by a material capable of forming a film or a film forming condition. It is to be. SOLUTION: A vacuum film forming apparatus 1 is provided with a laser device 16 for irradiating a laser beam 17 toward a target 5 arranged in a vacuum chamber 2. By irradiating the target 5 with the laser beam 17, a group of particles composed of a film material is ejected. Also, by supplying the power output from the power supply unit 10 through the base material holder 6 into the vacuum chamber 2, the particles are excited and ionized, and ions of the raw material of the film are incident on the base material 15. To form a film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015081358-A |
| priorityDate | 2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.