http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003021794-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0808 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate | 2001-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26a4367ed15652396be05c7e7739a111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f48aa7f613a54a16d597f7b0fc28fc8 |
| publicationDate | 2003-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003021794-A |
| titleOfInvention | Light modulation element, GLV device, and laser display |
| abstract | (57) [Problem] To provide a light modulation element having a uniform film thickness and a light reflection film and a membrane side electrode having a high light reflectance. SOLUTION: This light modulation element 30 is configured as a light modulation element constituting a GLV device, and is the same as a conventional light modulation element except that the structure of a light reflection film and a membrane side electrode 34 of a membrane 32 is different. It has a configuration. The light reflection film / membrane side electrode is formed of a two-layer metal film including a TiN film 36 having a thickness of 10 nm to 70 nm as a lower layer, and an Al film 38 having a thickness of 50 nm to 150 nm provided thereon. . The light reflecting film and membrane side electrode is A Since the l film 38 has a smooth reflection surface and exhibits a high light reflectance, the light use efficiency of the light modulation element is high. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10444493-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9791692-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016029430-A |
| priorityDate | 2001-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.