http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003021662-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2001-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7695ca926e499a75e10fb0a7783db45 |
| publicationDate | 2003-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003021662-A |
| titleOfInvention | CDM test equipment |
| abstract | (57) [Problem] A conventional CDM test apparatus cannot freely set an atmospheric temperature and a humidity under a test operation. A table (14) on which a work (13) is exchangeably mounted, a voltage application unit (20) to which a voltage for generating a discharge between the work (13) is applied, and the voltage application unit (20) and the table (14) are covered. C with cover 22 The DM test apparatus 10, a temperature adjusting unit for setting the inside of the working space 23 surrounded by the cover 22 to a predetermined temperature, a humidity adjusting unit for setting the inside of the working space 23 to a predetermined humidity, , A transparent work confirmation window 24 formed in a part of the cover 22, a dew condensation preventing means for the work confirmation window 24, and a work space formed on the floor surface 11. Drain port 2 facing 23 6 and a drainage channel 27 for discharging water droplets accumulated in the work space 23 from the drain port 26 to the outside of the work space 23. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012073765-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101806850-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013120096-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101806850-A |
| priorityDate | 2001-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 20.