http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003014807-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccf84e857059508e5fb7815cc6081f78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 |
| filingDate | 2001-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f42c2d3edf6c6207926c3472f162a885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6987af5bdeb4dee22ef51f59498c868c |
| publicationDate | 2003-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003014807-A |
| titleOfInvention | Capacitance measurement method, circuit board inspection method, and circuit board inspection apparatus |
| abstract | (57) [Summary] [PROBLEMS] To efficiently measure the capacitance of a pattern in a short time. A method of measuring a capacitance between counter electrodes between a pattern and an electrode by bringing a probe into contact with each other, wherein a process (step 30) for inspecting the disconnection of the pattern is executed, and the disconnection is detected. For each pattern that did not exist, the first counter electrode capacitance was measured with the probe being separated (step 32), and the second counter electrode capacitance was measured by bringing the probe into contact with the pattern. Processing (step 3) 3) and a process (step 34) for storing the difference capacitance between the capacitances between the two electrodes as the capacitance between the counter electrodes corresponding to the pattern, and the stored capacitances between the counter electrodes approach each other. Processing for detecting a group of patterns (step 36) And a process of inspecting a short circuit between patterns belonging to the group (step 37), and the inter-electrode capacitance stored excluding the inter-electrode capacitance of the pattern in which the short circuit is detected is normalized. The capacitance between the counter electrodes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230002489-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005037170-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7605553-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101256235-B1 |
| priorityDate | 2001-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.