| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 |
| filingDate |
2002-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3285ba7056f9d153c7955db0bb37f3f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_841efd84c67094b4fc87fff556ea7f35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27db38a9da92759e57c22a5f962a2d4b |
| publicationDate |
2003-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003008096-A |
| titleOfInvention |
Piezoelectric / electrostrictive film element |
| abstract |
(57) [Summary] [Object] To provide an element capable of preventing interference between a plurality of piezoelectric / electrostrictive operating portions provided on the same substrate surface and deterioration of element characteristics due to a large substrate rigidity. [Structure] A predetermined thick portion (8) around the bottom outer surface of each recess (5) a) From the surface, at least one groove (6) having an appropriate length deeper than the thickness of the bottom of the concave portion is formed along the inner wall surface (8b) of the concave portion and at an appropriate distance from the inner wall surface. A piezoelectric / electrostrictive film type element (1) characterized in that the element is formed by: |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7332851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006035723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4927551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006035723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100761343-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005027404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7943192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7882636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9976992-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007123585-A |
| priorityDate |
2002-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |