| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c05e1481593cf7a7f31bbf076799e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1512e632b2dd75442d3e4f65473c85eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3138fde95eafe03cf6c9a8cf3984f15 |
| publicationDate |
2003-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003005367-A |
| titleOfInvention |
Positive photosensitive resin composition and semiconductor device |
| abstract |
(57) [Problem] To provide a positive photosensitive resin composition having high sensitivity and low film loss. SOLUTION: 100 parts by weight of a polybenzoxazole precursor, a phenol compound having a skeleton represented by the general formula (2) and 1,2-naphthoquinone-2-diazide-5-sulfonic acid or 1,2-naphthoquinone-2- Diazide-4 -Positive type photosensitive comprising 1 to 50 parts by weight of a photosensitive diazoquinone compound (B) which is an ester compound with sulfonic acid and 1 to 30 parts by weight of a phenol compound (C) represented by the general formula (3). Resin composition. Embedded image |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005242344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4517792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4581706-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110582727-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110582727-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020319555-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005104977-A |
| priorityDate |
2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |