http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003004567-A

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filingDate 2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d11795661b1708710d7272472c261928
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publicationDate 2003-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003004567-A
titleOfInvention Pressure sensor and sphygmomanometer
abstract (57) Abstract: A pressure sensor capable of accurately controlling the response of a pressure sensor to a pressure change without significantly affecting other characteristics of the pressure sensor or hindering downsizing. I will provide a. SOLUTION: A pressure detection chamber 2 is provided on an upper surface of a main body side substrate 22. 3. The pressure guiding passage 25 and the buffer space 24 are recessed, the upper surface of the pressure sensing chamber 23 is covered with the thin diaphragm 31, and the upper surfaces of the pressure guiding passage 25 and the buffer space 24 are covered with the cover substrate 30. Cover with. Pressure introducing portion 26 provided on the lower surface of main body side substrate 22 Is connected to the lower surface of the buffer space 24. The cross section of the buffer space 24 is larger than the cross section of the pressure introducing section 26, and the volume of the buffer space 24 is also larger than the volume of the pressure guiding passage 25.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4529431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016017930-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018143557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11266349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018163573-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005172432-A
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Total number of triples: 28.