Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 |
filingDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1c294a98f93161b5852e8b601c0f25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bee50e65447e045d4dacda0c23cbbbf7 |
publicationDate |
2003-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2003003119-A |
titleOfInvention |
Composition for forming film, method for forming film, and silica-based film |
abstract |
PROBLEM TO BE SOLVED: To provide a film-forming composition which exhibits a relative dielectric constant of 2.5 or less as a material for an interlayer insulating film in a semiconductor element or the like, and provides a coating film excellent in coating film hardness and low hygroscopicity. Get. SOLUTION: (A) hydrolysis of alkoxysilane, A film-forming composition comprising a hydrolyzed condensate obtained by condensation, (B) a specific organic solvent, and (C) fullerene and / or carbon nanotube. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100548826-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7790234-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875315-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005023466-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007056125-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110027270-A |
priorityDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |