| abstract |
PROBLEM TO BE SOLVED: To provide a safe and low-cost 3C-SiC nanowhisker synthesis method that can control the diameter and length, can be grown on a Si substrate, and is low in cost. In addition, 3C-SiC nanowhiskers having different emission wavelengths of visible light are provided. SOLUTION: A thin film 2 made of a metal element on a Si substrate 1 Is formed, and the substrate 1 is formed by holding the substrate 1 in a plasma composed of hydrogen and hydrocarbons at a predetermined substrate temperature for a certain period of time. The Si of the Si substrate 1 and C in the plasma dissolve into the metal liquid particles 3 in supersaturation, and 3C-SiC nanowhiskers 4 grow on the metal liquid particles 3, and the surface of the whiskers is terminated with H to keep the diameter constant. Then, the metal liquid particles 3 at the root of the whiskers take in the Si of the Si substrate 1 and sink into the Si substrate 1. |