| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00 |
| filingDate |
1999-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002516378-A |
| titleOfInvention |
CMP slurry containing solid catalyst |
| abstract |
(57) [Summary]nA chemical mechanical polishing composition comprising an oxidizing agent and at least one solid catalyst, the composition being useful when an abrasive or abrasive pad is combined to remove many metal layers from a substrate. . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103252710-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103252710-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007534167-A |
| priorityDate |
1998-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |