| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-00 |
| filingDate |
1999-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002516349-A |
| titleOfInvention |
Cleaning method for flat panel display using high pressure fluid |
| abstract |
(57) Abstract: The components of a flat panel display are cleaned with a fluid having a predominant mole fraction of components. The cleaning operation is performed by exposing the part to a cleaning fluid, wherein the absolute pressure of the fluid is higher than the absolute pressure at the triple point of the primary component and at least 20% of the value of the absolute pressure at the critical point of the primary component. Value. The temperature and pressure of the cleaning fluid are typically controlled toward the supercritical state of the major components. |
| priorityDate |
1998-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |