http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002515833-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-10 |
| filingDate | 1998-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002515833-A |
| titleOfInvention | Polishing media magazine for improved polishing |
| abstract | SUMMARY OF THE INVENTION A polishing media magazine (350) for improved polishing. The polishing media magazine (350) may include conditioning elements (305) for quick and uniform conditioning and cleaning of the polishing media (310). The polishing media magazine (350) may include a polishing media (310) having an elevated height portion (315) to confine the fluid and urge the edges of the polishing media (310) upward. May include a polishing support platen (355) having features adapted as such. Abrasive media (310) may be rolled from supply roll (300) across support platen (355) onto take-up roll (340). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101283001-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8257150-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7354337-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7731569-B2 |
| priorityDate | 1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.