| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate |
2001-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ba19ac52c085275169b35d3ba48b7cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8334470da238f08719d6d8ea20bd415d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80f8031a5cd9a9b93cc4305d9b09d47f |
| publicationDate |
2002-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002367930-A |
| titleOfInvention |
Dicing device with Z correction |
| abstract |
(57) [Summary] [Problem] Even if the suction cup of the work table is replaced, Provided is a dicing device capable of correcting the Z-direction position of a blade with a simple operation. The present invention provides a dicing apparatus having a blade (12). And a tilt correcting means 48 for correcting the tilt of the suction plate 24A of the work table 24. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014283658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828344-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180020889-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017199777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102271652-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011218477-A |
| priorityDate |
2001-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |