http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002367508-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 |
| filingDate | 2002-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f554cb3c1d580c29f9f1f73310de37a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da587be5bbb72ec40716f64964e3b4d8 |
| publicationDate | 2002-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002367508-A |
| titleOfInvention | Electron emitting element, electron source, and method of manufacturing image forming apparatus |
| abstract | (57) [Problem] To provide an electron-emitting device and a method of manufacturing an electron source, which can form a film of carbon or a carbon compound having good crystallinity in an activation step in a shorter time. SOLUTION: A step of forming a pair of conductors 4 spaced apart from each other on a substrate 1 and, in an atmosphere of a carbon compound gas, applying carbon or a carbon compound to at least one of the pair of conductors. And an activation step of depositing 4a. The activation step includes a plurality of steps of two or more steps including a first step and a second step. The first step is a final activation step. The process is performed in an atmosphere in which the partial pressure of the carbon compound gas is higher than in the certain second step. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7524227-B2 |
| priorityDate | 1999-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.