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filingDate 2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35033448a14c4092423fc734deaf38b3
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publicationDate 2002-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002365680-A
titleOfInvention Three-dimensional optical waveguide, optical waveguide device, harmonic generator, and method of manufacturing three-dimensional optical waveguide
abstract [PROBLEMS] To form an optical waveguide on a ferroelectric substrate having a ferroelectric polarization axis substantially parallel to a processed surface of the substrate. It is possible to provide an optical waveguide with small optical loss and high d value. A substrate 1 made of a ferroelectric single crystal is provided. The exchange processing unit 2 is formed by subjecting the substrate 1 having a ferroelectric polarization axis substantially parallel to the processing surface 1a of the substrate 1 to proton exchange processing from the processing surface 1a side. The ridge structure 4 including at least a part 2A of the exchange processing unit is formed. Then The optical waveguide 5 is obtained by subjecting the exchange processing unit 2A to thermal diffusion processing.
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