http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002353420-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-516
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78391
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788
filingDate 2002-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a80ee9b5856b6b5f0affa1b76d8adb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d864dd2bc22c2ceda5110352c717a01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6909112efa2c018c42c43f5d29940e
publicationDate 2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002353420-A
titleOfInvention MFOS memory transistor and method of manufacturing the same
abstract (57) Abstract: To provide a ferroelectric transistor structure for improving the reliability of a memory transistor and a method for manufacturing the same. SOLUTION: The ferroelectric transistor structure of the present invention comprises: a) a ferroelectric gate having a lower portion, a side surface, and an upper portion on a semiconductor substrate; b) a gate insulator inserted between the ferroelectric gate and the semiconductor substrate; c) passivation adjacent to the side surface. And sidewalls. The semiconductor substrate is silicon or SOI, and the ferroelectric gate is PG O, PZT, SBT, SBO, SBTO, SBTN, S TO, BTO, BLT, LNO or YMnO 3 .
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008041832-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006060209-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160034917-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7226795-B2
priorityDate 2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453263778
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454013724
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16685708
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454240392
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87114570
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411303255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17979268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24817
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578251
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90139
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44544175
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099666
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414803645
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453396070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82844

Total number of triples: 62.