| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J41-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F291-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06M14-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D85-86 |
| filingDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5d8e5217cc29ef5248c6fbeff773335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0354e2be5c057bfdeb97f8f9e8d8537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25eb0c2a8e4dda3ccd7c4c59f8c9bd01 |
| publicationDate |
2002-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002353300-A |
| titleOfInvention |
Clean box with new anion exchanger |
| abstract |
(57) [Abstract] [Problem] To store semiconductor wafers in a clean environment without causing problems such as re-release of adsorbed substances and amine contamination. Provide a clean box that can be transported. SOLUTION: The clean box according to the present invention has a graft polymer side chain derived from a styrene compound having a halogenated alkyl group on a benzene ring on a main chain of an organic polymer base material, A functional group derived from a polyamine compound having one tertiary amino group and one or more primary, secondary or tertiary amino groups and / or quaternary ammonium groups is introduced on the polymer side chain. Characterized in that an anion exchanger is mounted. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004204401-A |
| priorityDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |