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filingDate 2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002350440-A
titleOfInvention DNA chip manufacturing method and DNA chip obtained by this method
abstract PROBLEM TO BE SOLVED: To provide a method for producing a DNA chip which can be produced at a low cost by a simple process, has a small loss of probe DNA and sample DNA in a washing step and the like, and can effectively utilize a DNA sample. Produced by the method Provide A chip. SOLUTION: After the inside of a vacuum chamber is set to a predetermined degree of vacuum, a source gas for a diamond-like film is supplied, a source gas serving as a nitrogen source is further introduced, and DN is deposited on the substrate by a CVD method. Forming a diamond-like film having an A-bonding group to form a DN A method for producing a DNA chip having a configuration of the A-bonding layer was adopted.
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