http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002350395-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-26 |
filingDate | 2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58196a619ddad2ff4f0d7cc0b8c0ae6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3e8fc2a07d00ebde2d41a1277d53aa9 |
publicationDate | 2002-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2002350395-A |
titleOfInvention | Measuring method of chlorine concentration in plating solution |
abstract | (57) [Problem] To provide a method capable of accurately measuring a chlorine concentration even when a chlorine concentration of a plating solution is extremely low. A voltage is applied between a counter electrode (14) immersed in a plating solution (12) and a working electrode (16). When the potential of the working electrode with respect to a reference electrode (18) is a predetermined potential, the voltage is applied between the working electrode and the counter electrode. In the method of measuring the flowing current and measuring the chlorine concentration of the plating solution from a calibration curve prepared in advance, every time the chlorine concentration of the plating solution is measured, the temperature of the plating solution is measured by the temperature sensor 28, and the measurement is performed. Calibrate the calibration curve with temperature. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7169269-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8607612-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011105968-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013083820-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014515482-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101942022-B1 |
priorityDate | 2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.