http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002339076-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate | 2001-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51b9842b268518ce4b1f4132273b83e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2be707f5cc72d29cabf3165f0ac1a4 |
| publicationDate | 2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002339076-A |
| titleOfInvention | Method of forming metallic copper thin film and composition for forming copper thin film |
| abstract | (57) [Summary] (with correction) [PROBLEMS] To provide a composition and a method which can easily and inexpensively form wirings and electrodes which can be suitably used for many electronic devices. SOLUTION: A compound represented by the following formula (1) [R 1 COO] 2 Cu (1) (where R 1 represents an alkyl group having 4 to 12 carbon atoms) and the following formula ( 2) [R 2 -COCH = C (O) -R 3] 2 Cu ยทยทยท (2) wherein R 2 and R 3 are the same or different and are an alkyl group having 1 to 12 carbon atoms, and at least one compound selected from the group consisting of compounds represented by the formula: The solution of the composition for forming a metal copper thin film to be applied is applied and subjected to heat and / or light treatment. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005150710-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4732118-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6977707-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006128691-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007115739-A |
| priorityDate | 2001-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 113.